学术报告题目：
Data Driven Fault Detection and Diagnosis -- Experiences Learned From Advanced Process Control Implementation in Semiconductor Manufacturing
报告人：David Shan Hill Wong
Department of Chemical Engineering, National Tsing Hua University, Hsinchu, Taiwan
时间地点：
12月8日上午10:30 - 11:30 南一楼311
ABSTRACT：
Statistical process/quality control (SPC/SQC) has been practiced for a long time in manufacturing industry. SPC/SQC can be regarded as data-driven fault detection and diagnosis that relied on statistical analysis of data based certain probability distribution. Traditionally single variable SPC/SQC were used. However, as the sophistication and complexity of the manufacturing tool increases and the cost of data acquisition decreases, multivariate analysis such as principle component analysis (PCA), partial least square (PLS) and canonical variable analysis (CVA) have recently been widely used. In this work, we shall illustrate the motivation and challenges of implementing these methods in semiconductor manufacturing by several case studies on fault detection, diagnosis, and virtual metrology development. We shall show that in a data-driven approach, the ability to distill information from massive amount of data is of primary importance.
报告人简介：
Education
B.Sc. |
CHE |
1978 |
California Institute of Technology, U.S.A, |
|
M.Sc. |
CHE |
1981 |
University of Delaware, U.S.A, |
|
Ph.D. |
CHE |
1982 |
University of Delaware, U.S.A, |
|
EXPERIENCE |
|
Associate Professor |
1983~ 1988 |
Department of Chemical Engineering, National Tsing Hua University, Hsinchu,
Taiwan
|
Professor |
1989~ now |
Department of Chemical Engineering, National Tsing Hua University, Hsinchu,
Taiwan
|
Visiting Research Fellow |
1991~ 1992 |
Department of Chemical Engineering, University of Delaware, U.S.A |
Visiting Reader |
1996 |
Department of Chemical Engineering, Hong Kong University of Science and Technology |
Visiting Professor |
1996 |
State Key Laboratory of High Pressure Phase Equilibria, Department of Chemical Engineering University of Petroleum, Bejing |
Visiting Reader |
2000 |
Department of Chemical Engineering, National University of
Singapore
|
RESEARCH INTERESTS AND FUNDING |
|
(1) Advanced process control in multistage, parallel tool mixed product environment, e.g. semiconductor manufacturing, liquid crystal display manufacturing. (2) Design and control in petrochemical process intensification. (3) Applications of system dynamics in biological research. (4) Thermodynamics and applications of ionic liquids. |
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